Zero particles. Zero risk. Maximum flow analysis. Particle-free flow measurement
for cleanrooms in the semiconductor and microelectronics industry
Precise flow control
for semiconductor production and microelectronics
In the semiconductor and microelectronics industry, cleanrooms are essential for the production of high-quality chips and components. Even the smallest air turbulence or particles can cause defects and rejects. Precise air flow control is therefore required to ensure contamination-free production conditions.
With the FlowBOS CR camera, LaVision offers an optical high-precision system that visualizes air flows in cleanrooms – without particles, without contamination, without lengthy interruptions to operation.
Airflow concepts in cleanrooms - Why precision measurements
are essential
Laminar flow zones
Uniform, unidirectional air flow for critical processes
Low-turbulence displacement flow (TAV)
Especially for microelectronics with air extraction via raised floors
Hybrid solutions
Combination of turbulent mixed flow and directed airflow for specific production areas
LaVision - your ideal partner for cleanroom measurements
- World market leader in optical flow analysis – More than 35 years of experience in high-tech industries
- Established system for semiconductor & microelectronics production – Precise, reliable & residue-free measurements
- Real-time visualization without particles – ensuring clean air flows without aerosols
- Maximum efficiency & safety – error detection and process optimization without lengthy business interruptions and risks of contamination
FlowBOS CR camera -
Detailed measurement of particle-free air flows
LaVision’s FlowBOS CR cameras for flow visualization in cleanrooms work with a harmless and optically active tracer gas instead of aerosols, which prevents particle contamination from the outset.
Contamination-free airflow analysis for cleanrooms
in semiconductor and microelectronics production
Air and (tracer gas) inoculation gas are physically identical with ideal subsequent behavior for your analysis
Convincing features of the FlowBOS CR camera
Comprehensive FlowBOS data visualization and analysis
Maximum efficiency in flow analysis requires not only precise measuring devices, but also powerful data analysis for evaluating and visualizing the measurement data. FlowBos is one of the world’s leading solutions for analyzing flows, thermal processes and particle movements. Our camera systems enable the complete processing, evaluation and documentation of measurement data in an intuitive environment.
Advantages of the data analysis used
- Automated data acquisition and processing – Reduces manual work steps and sources of error
- High-precision image processing & flow analysis – Detailed visualization of all relevant parameters
- Real-time analysis & comparison with reference values – Immediate identification of deviations
- Optimized workflows and reporting functions – Documentation according to the highest quality standards
Areas of application in the semiconductor industry
- Air flow analysis in cleanrooms – optimization of flow concepts for a low-particle environment
- Leakage detection – fast identification of leaks in production processes
- Thermal flow analysis – optimization of cooling systems for sensitive components
- Real-time monitoring & quality control – ensuring constant production conditions
Questions & answers about using the FlowBOS
CR camera in the semiconductor industry
Why is optical flow visualization better than conventional smoke tests?
How can FlowBOS CR improve the efficiency of cleanrooms?
Which flow concepts can be analyzed with FlowBOS CR?
- Laminar flow (unidirectional)
- Low-turbulence displacement flow (TAV)
- Mixed flow for specific applications
Is FlowBOS CR suitable for high-purity production areas?
How can FlowBOS CR be integrated into existing quality control systems?
Thanks to intelligent data interfaces, FlowBOS CR can be integrated directly into existing QC and monitoring systems.