Zero particles. Zero risk. Maximum flow analysis. Particle-free flow measurement
for cleanrooms in the semiconductor and microelectronics industry

Precise flow control
for semiconductor production and microelectronics

In the semiconductor and microelectronics industry, cleanrooms are essential for the production of high-quality chips and components. Even the smallest air turbulence or particles can cause defects and rejects. Precise air flow control is therefore required to ensure contamination-free production conditions.

With the FlowBOS CR camera, LaVision offers an optical high-precision system that visualizes air flows in cleanrooms – without particles, without contamination, without lengthy interruptions to operation.

Airflow concepts in cleanrooms - Why precision measurements
are essential

Choosing the right airflow concept is crucial for the efficiency and cleanliness class of a cleanroom. With FlowBOS CR, these airflow concepts can be tested and optimized in real time. Different manufacturing processes and spatial conditions require specific flow concepts:
Machine producing printed circuit board in PCB manufacturing process

Laminar flow zones

Uniform, unidirectional air flow for critical processes

Low-turbulence displacement flow (TAV)

Especially for microelectronics with air extraction via raised floors

Hybrid solutions

Combination of turbulent mixed flow and directed airflow for specific production areas

LaVision - your ideal partner for cleanroom measurements

  • World market leader in optical flow analysis – More than 35 years of experience in high-tech industries
  • Established system for semiconductor & microelectronics production – Precise, reliable & residue-free measurements
  • Real-time visualization without particles – ensuring clean air flows without aerosols
  • Maximum efficiency & safety – error detection and process optimization without lengthy business interruptions and risks of contamination
LaVision FlowBOS system measuring particle-free airflow in a semiconductor cleanroom
FlowBOS-Camera-CR1 measuring particle-free airflow in semiconductor cleanroom

FlowBOS CR camera -
Detailed measurement of particle-free air flows

LaVision’s FlowBOS CR cameras for flow visualization in cleanrooms work with a harmless and optically active tracer gas instead of aerosols, which prevents particle contamination from the outset.

Contamination-free airflow analysis for cleanrooms
in semiconductor and microelectronics production

Video recordings of the undisturbed air flow in real time

Air and (tracer gas) inoculation gas are physically identical with ideal subsequent behavior for your analysis

FlowBOS CR (Cleanroom) camera especially for use in semiconductor cleanrooms

Convincing features of the FlowBOS CR camera

Sensitive imaging technology for monitoring (thermal) air flows and movement fields without flow particles
Adjustable measuring fields for maximum flexibility in different production areas
Simple system installation & software interface for process integration
High scalability – measurements in the near and far range for small modules to large production lines
Flexible sensitivity – Adaptable to different ambient conditions and airflow velocities
Live data acquisition with immediate visualization & reporting function
Airflow and temperature testing using LaVision optical measurement technology for precise visualization and analysis

Comprehensive FlowBOS data visualization and analysis

Maximum efficiency in flow analysis requires not only precise measuring devices, but also powerful data analysis for evaluating and visualizing the measurement data. FlowBos is one of the world’s leading solutions for analyzing flows, thermal processes and particle movements. Our camera systems enable the complete processing, evaluation and documentation of measurement data in an intuitive environment.

Advantages of the data analysis used

  • Automated data acquisition and processing – Reduces manual work steps and sources of error
  • High-precision image processing & flow analysis – Detailed visualization of all relevant parameters
  • Real-time analysis & comparison with reference values – Immediate identification of deviations
  • Optimized workflows and reporting functions – Documentation according to the highest quality standards

Areas of application in the semiconductor industry

  • Air flow analysis in cleanrooms – optimization of flow concepts for a low-particle environment
  • Leakage detection – fast identification of leaks in production processes
  • Thermal flow analysis – optimization of cooling systems for sensitive components
  • Real-time monitoring & quality control – ensuring constant production conditions

Questions & answers about using the FlowBOS
CR camera in the semiconductor industry

FlowBOS CR enables measurements without particles or smoke, making it suitable for cleanrooms. Conventional methods such as smoke tests can leave contaminants behind.
The precise visualization and optimization of air flows can reduce energy consumption and improve production processes.
  • Laminar flow (unidirectional)
  • Low-turbulence displacement flow (TAV)
  • Mixed flow for specific applications
Yes, the camera is completely encapsulated (IP67), suitable for contamination-free measurements and meets the highest cleanroom standards.

Thanks to intelligent data interfaces, FlowBOS CR can be integrated directly into existing QC and monitoring systems.

Integrate the FlowBOS CR
into your cleanroom inspection now!

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